Low Pressure Plasma

1. Zepto

Basic equipment
  • The housing size varies depending on the components/options
  • Chamber volumes: 1.7 - 2.6 litres, depending on the version.
  • Power supply: 230 V
Gas supply
  • Needle valve
  • Mass Flow Controllers (MFCs)
Vacuum chambers
  • Quartz glass (UHP) round with lid
    (approx. ∅ 105 mm, L 200 mm or L 300 mm)
  • Borosilicate glass (UHP) round with lid
    (approx. ∅ 105 mm, L 200 mm or L 300 mm)
Load
  • Product carrier: Aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
  • Single, or multiple levels
Control
  • Manual
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)
Pressure measurement
  • Pirani
Timer
  • Digital
Generators Frequencies:
  • 40 kHz: Power 0 - 100 W
  • 13.56 MHz: Power 0 - 50 W
Vacuum pumps:
  • In different sizes and from various manufacturers (as required with activated carbon filter)

2. Pico

Basic equipment
  • The housing size varies depending on the components/options
  • Chamber volumes: 4 - 15 litres, depending on the version
  • Power supply: 230 V for table top systems, 400 V/3-phase for stand-alone systems
Gas supply
  • Needle valve
  • Mass Flow Controllers (MFCs)
Vacuum chambers
  • Stainless steel, round, with lid
    (approx. ∅ 150 mm, L 320 mm or L 600 mm) or
  • Stainless steel, rectangular, with hinged door
    (approx. W 160 x H 160 x D 325 or 600mm)
  • Aluminium, round, with lid or hinged door
    (approx. ∅ 130 mm, L 300 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door
    (approx. ∅ 130 mm, L 300 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid
    (approx. ∅130 mm, L 300 mm or L 600 mm)
Loading
  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
  • Single, or multiple levels
  • RIE
Control
  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
  • Pirani
  • Baratron (for corrosive gas version)
Timer
  • Digital
Generators Frequencies:
  • 40 kHz: Power 0 - 200 W; 0 -1000 W
  • 13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W
  • 2.45 GHz: Power 0 - 300 W

All generators are continuously adjustable from 0 - 100%

Vacuum pumps:
  • In different sizes and from various manufacturers (as required with activated carbon filter)

3. Nano

Basic equipment
  • The housing size varies depending on the components/options
  • Chamber volumes: 18 - 36 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
Gas supply
  • Needle valve
  • Mass Flow Controllers (MFCs)
Vacuum chambers
  • Stainless steel, round, with lid
    (approx. ∅ 267 mm, L 420 mm or L 600 mm) or
  • Stainless steel, rectangular, hinged door
    (approx. W 240 mm x D 420 mm or 600 mm)
  • Aluminium, round, with lid or hinged door
    (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door
    (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door
    (approx.∅ 240 mm, L 400 mm or L 600 mm)
Loading
  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
  • Single, or multiple levels
  • RIE
Control
  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
  • Pirani
  • Baratron (for corrosive gas version)
Timer
  • Digital
Generators Frequencies:
  • 40 kHz: Power 0 - 300 W; 0 - 1000 W
  • 13.56 MHz: Power 0 - 100 W; 0 - 300 W
  • 2.45 GHz: Power 0 - 600 W;

All generators are continuously adjustable from 0 - 100%

Vacuum pumps:
  • In different sizes and from various manufacturers (with active carbon filter, if required)

4. Tetra 30

Basic equipment
  • The housing size varies depending on the components/options
  • Chamber volumes: 34 - 57 litres, depending on the version
  • Power supply: 230 V or 400 V/3-phase
Gas supply
  • Mass Flow Controllers (MFCs)
Vacuum chambers
  • Stainless steel, rectangular, hinged door
    (approx. W 305 mm x D 370 mm or 625 mm)
Loading
  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
  • Single, or multiple levels
  • RIE electrodes with gas shower
Control
  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
  • Pirani
  • Baratron (for corrosive gas version)
Timer
  • Digital
Generators Frequencies:
  • 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W
  • 13.56 MHz: Power 0 - 300 W; 0 - 600 W
  • 2.45 GHz: Power 0 - 600 W; 0 - 1200 W

All generators are continuously adjustable from 0 - 100%

Vacuum pumps:
  • In different sizes and from various manufacturers (as required with activated carbon filter)

5. Tetra 150

Basic equipment
  • The housing size varies depending on the components/options
  • Chamber volumes: 150 litres, depending on the version
  • Power supply: 230 V or 400 V/3-phase
Gas supply
  • Mass Flow Controllers (MFCs)
Vacuum chambers
  • Stainless steel, rectangular, hinged door
    (approx. W 400 x H 600 mm x D 625 mm)
Loading
  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
  • Single, or multiple levels
  • RIE electrodes with gas shower
Control
  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
  • Pirani
  • Baratron (for corrosive gas version)
Timer
  • Digital
Generators Frequencies:
  • 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W
  • 13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000 W
  • 2.45 GHz: Power 0 - 1200 W

All generators are continuously adjustable from 0 - 100%

Vacuum pumps:
  • In different sizes and from various manufacturers (as required with activated carbon filter)